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MSS membrane-type surface stress sensor chip

Detect the presence of target gases and odor molecules! Magnetic torque detection experiments are also possible.

The "membrane-type surface stress sensor chip" is a MEMS sensor composed of a silicon membrane and a piezoresistor. It detects slight membrane deformations caused by external forces using the piezoresistor. [Application to artificial olfaction] When the coating film absorbs VOCs, the receptor layer generates surface stress, deforming the membrane and causing a change in resistance of the piezoresistor. By monitoring this change, the presence of target gases or odor molecules is detected. [Application to magnetic torque detection] Experiments for detecting magnetic torque in organic conductors and superconductors under DC and pulsed magnetic fields are possible. *For more details, please refer to the PDF document or feel free to contact us.